47 research outputs found

    Overlay Accuracy Limitations of Soft Stamp UV Nanoimprint Lithography and Circumvention Strategies for Device Applications

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    In this work multilevel pattering capabilities of Substrate Conformal Imprint Lithography (SCIL) have been explored. A mix & match approach combining the high throughput of nanoimprint lithography with the excellent overlay accuracy of electron beam lithography (EBL) has been exploited to fabricate nanoscale devices. An EBL system has also been utilized as a benchmarking tool to measure both stamp distortions and alignment precision of this mix & match approach. By aligning the EBL system to 20 mm x 20 mm and 8 mm x 8 mm cells to compensate pattern distortions of order of 3ΞΌm3 \mu m over 6 inch wafer area, overlay accuracy better than 1.2ΞΌm1.2 \mu m has been demonstrated. This result can partially be attributed to the flexible SCIL stamp which compensates deformations caused by the presence of particles which would otherwise significantly reduce the alignment precision

    A verified equivalent-circuit model for slotwaveguide modulators

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    We formulate and experimentally validate an equivalent-circuit model based on distributed elements to describe the electric and electro-optic (EO) properties of travellingwave silicon-organic hybrid (SOH) slot-waveguide modulators. The model allows to reliably predict the small-signal EO frequency response of the modulators exploiting purely electrical measurements of the frequency-dependent RF transmission characteristics. We experimentally verify the validity of our model, and we formulate design guidelines for an optimum trade-off between optical loss due to free-carrier absorption (FCA), electro-optic bandwidth, and {\pi}-voltage of SOH slot-waveguide modulators

    A programmable, multi-format photonic transceiver platform enabling flexible optical networks

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    Development of programmable photonic devices for future flexible optical networks is ongoing. To this end, an innovative, multi-format QAM transmitter design is presented. It comprises a segmented-electrode InP IQ-MZM to be fabricated in InP, which can be directly driven by low-power CMOS logic. Arbitrary optical QAM format generation is made possible using only binary electrical signals, without the need for high-performance DACs and high-swing linear drivers. The concept enables a host of Tx-side DSP functionality, including the spectral shaping needed for Nyquist-WDM system concepts. In addition, we report on the development of an optical channel MUX/DEMUX, based on arrays of microresonator filters with reconfigurable bandwidths and center wavelengths. The device is intended for operation with multi-format flexible transceivers, enabling Dense (D)WDM superchannel aggregation and arbitrary spectral slicing in the context of a flexible grid environment

    Verified equivalent-circuit model for slot-waveguide modulators

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    We formulate and experimentally validate an equivalent-circuit model based on distributed elements to describe the electric and electro-optic (EO) properties of travelling-wave silicon-organic hybrid (SOH) slot-waveguide modulators. The model allows to reliably predict the small-signal EO frequency response of the modulators exploiting purely electrical measurements of the frequency-dependent RF transmission characteristics. We experimentally verify the validity of our model, and we formulate design guidelines for an optimum trade-off between optical loss due to free-carrier absorption (FCA), electro-optic bandwidth, and Ο€-voltage of SOH slot-waveguide modulators

    A verified equivalent-circuit model for slotwaveguide modulators

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    We formulate and experimentally validate an equivalent-circuit model based on distributed elements to describe the electric and electro-optic (EO) properties of travellingwave silicon-organic hybrid (SOH) slot-waveguide modulators. The model allows to reliably predict the small-signal EO frequency response of the modulators exploiting purely electrical measurements of the frequency-dependent RF transmission characteristics. We experimentally verify the validity of our model, and we formulate design guidelines for an optimum trade-off between optical loss due to free-carrier absorption (FCA), electro-optic bandwidth, and {\pi}-voltage of SOH slot-waveguide modulators

    Π Π°Π·Ρ€Π°Π±ΠΎΡ‚ΠΊΠ° мСроприятий для ΠΏΠΎΠ²Ρ‹ΡˆΠ΅Π½ΠΈΡ эффСктивности ΠΈ бСзопасности Ρ€Π°Π±ΠΎΡ‚Ρ‹ ΠΎΠ±ΡŠΠ΅ΠΊΡ‚ΠΎΠ² Π»ΠΈΠ½Π΅ΠΉΠ½ΠΎΠΉ части участка ΠΌΠ°Π³ΠΈΡΡ‚Ρ€Π°Π»ΡŒΠ½ΠΎΠ³ΠΎ Π³Π°Π·ΠΎΠΏΡ€ΠΎΠ²ΠΎΠ΄Π° "Π‘ΠΈΠ»Π° Π‘ΠΈΠ±ΠΈΡ€ΠΈ"

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    ΠžΠ±ΡŠΠ΅ΠΊΡ‚ΠΎΠΌ исслСдования являСтся участок ΠΌΠ°Π³ΠΈΡΡ‚Ρ€Π°Π»ΡŒΠ½ΠΎΠ³ΠΎ Π³Π°Π·ΠΎΠΏΡ€ΠΎΠ²ΠΎΠ΄Π° "Π‘ΠΈΠ»Π° Π‘ΠΈΠ±ΠΈΡ€ΠΈ". ЦСль Ρ€Π°Π±ΠΎΡ‚Ρ‹ – Ρ€Π°Π·Ρ€Π°Π±ΠΎΡ‚ΠΊΠ° мСроприятий для ΠΏΠΎΠ²Ρ‹ΡˆΠ΅Π½ΠΈΡ эффСктивности ΠΈ бСзопасности Ρ€Π°Π±ΠΎΡ‚Ρ‹ ΠΎΠ±ΡŠΠ΅ΠΊΡ‚ΠΎΠ² Π»ΠΈΠ½Π΅ΠΉΠ½ΠΎΠΉ части ΠΌΠ°Π³ΠΈΡΡ‚Ρ€Π°Π»ΡŒΠ½ΠΎΠ³ΠΎ Π³Π°Π·ΠΎΠΏΡ€ΠΎΠ²ΠΎΠ΄Π° "Π‘ΠΈΠ»Π° Π‘ΠΈΠ±ΠΈΡ€ΠΈ". Π’ процСссС исслСдования ΠΏΡ€ΠΎΠ²ΠΎΠ΄ΠΈΠ»ΠΈΡΡŒ расчСты Ρ‚ΠΎΠ»Ρ‰ΠΈΠ½Ρ‹ стСнки Ρ‚Ρ€ΡƒΠ±ΠΎΠΏΡ€ΠΎΠ²ΠΎΠ΄Π°, расчСт Π½Π° ΠΏΡ€ΠΎΡ‡Π½ΠΎΡΡ‚ΡŒ ΠΈ ΡƒΡΡ‚ΠΎΠΉΡ‡ΠΈΠ²ΠΎΡΡ‚ΡŒ, ΠΏΡ€ΠΎΠ³Π½ΠΎΠ·Π½Ρ‹ΠΉ расчСт Ρ€Π°Π·ΠΌΡ‹Π²Π° Π³Ρ€ΡƒΠ½Ρ‚Π° засыпки Π½Π° склонС Π½Π° основании БП 36.13330.2012, БП 425.1325800.2018, Π° Ρ‚Π°ΠΊΠΆΠ΅ с использованиСм Π Π” 51-2.4-007-97 ΠΊΠ°ΠΊ справочного ΠΌΠ°Ρ‚Π΅Ρ€ΠΈΠ°Π»Π°. РассмотрСны вопросы ΠΏΡ€ΠΈΡ‡ΠΈΠ½ ΠΈ послСдствий Π°Π²Π°Ρ€ΠΈΠΉ Π½Π° ΠΌΠ°Π³ΠΈΡΡ‚Ρ€Π°Π»ΡŒΠ½Ρ‹Ρ… Π³Π°Π·ΠΎΠΏΡ€ΠΎΠ²ΠΎΠ΄Π°Ρ… (ΠœΠ“), воздСйствия Π½Π° ΠœΠ“ опасных гСологичСских процСссов (ΠžΠ“ΠŸ), рассмотрСниС процСсса Ρ€Π°Π·Ρ€Π°Π±ΠΎΡ‚ΠΊΠΈ ΠΈ обоснования Π²Ρ‹Π±ΠΎΡ€Π° мСроприятий ΠΈ сооруТСний ΠΈΠ½ΠΆΠ΅Π½Π΅Ρ€Π½ΠΎΠΉ Π·Π°Ρ‰ΠΈΡ‚Ρ‹ ΠœΠ“ ΠΎΡ‚ эрозионных процСссов.The object of study is the section of the Power of Siberia gas pipeline. The purpose of the work is the development of measures to improve the efficiency and safety of the facilities of the linear part of the Power of Siberia gas pipeline. In the course of the study, calculations were made of the wall thickness of the pipeline, a calculation of strength and stability, a predictive calculation of erosion of backfill soil on the slope based on SP 36.13330.2012, SP 425.1325800.2018, and also using RD 51-2.4-007-97 as reference material. Issues of the causes and consequences of accidents on main gas pipelines (MG), the impact on MG of hazardous geological processes (GCP)

    Resistive Switching and Current Conduction Mechanisms in Hexagonal Boron Nitride Threshold Memristors with Nickel Electrodes

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    The two-dimensional (2D) insulating material hexagonal boron nitride (h BN) has attracted much attention as the active medium in memristive devices due to its favorable physical properties, among others, a wide bandgap that enables a large switching window. Metal filament formation is frequently suggested for h-BN devices as the resistive switching (RS) mechanism, usually supported by highly specialized methods like conductive atomic force microscopy (C-AFM) or transmission electron microscopy (TEM). Here, we investigate the switching of multilayer hexagonal boron nitride (h-BN) threshold memristors with two nickel (Ni) electrodes through their current conduction mechanisms. Both the high and the low resistance states are analyzed through temperature-dependent current-voltage measurements. We propose the formation and retraction of nickel filaments along boron defects in the h-BN film as the resistive switching mechanism. We corroborate our electrical data with TEM analyses to establish temperature-dependent current-voltage measurements as a valuable tool for the analysis of resistive switching phenomena in memristors made of 2D materials. Our memristors exhibit a wide and tunable current operation range and low stand-by currents, in line with the state of the art in h-BN-based threshold switches, a low cycle-to-cycle variability of 5%, and a large On/Off ratio of 107{^7}.Comment: 39 page

    Surface modified silicon nanochannel for urea sensing

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    Silicon nanowires have been surface functionalized with the enzyme urease for biosensor applications to detect and quantify urea concentration. The device is nanofabricated from a silicon on insulator (SOI) wafer with a top down lithography approach. The differential conductance of silicon nanowires can be tuned for optimum performance using the source drain bias voltage, and is sensitive to urea at low concentration. The experimental results show a linear relationship between surface potential change and urea concentration in the range of 0.1 to 0.68 mM. The sensitivity of our devices shows high reproducibility with time and different measurement conditions. The nanowire urea biosensor offers the possibility of high quality, reusable enzyme sensor array integration with silicon based circuits.Comment: 5 pages, 6 figures, two-column format. Related papers can be found at nano.bu.ed
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